Manufacturer: Film Sensor

Applications: 

+ Film Sense Multi-Wavelength ellipsometers excel at measuring the thickness and index of refraction of transparent single films

+ Multi-Wavelength Ellipsometry can also be used to measure multilayer film stacks (in some cases up to 5 layers), depending on the thicknesses and indices of refraction of the layers. Simulations can be performed in the Film Sense software to determine if a particular sample structure is possible. For some samples, surface roughness and index gradients in the film can also be characterized.

+ Film Sense Automated Mapping Systems are fast, easy to operate, and can characterize thickness uniformity on wafers up to 300 mm in diameter.

Technology: 

Film Sense ellipsometers use polarized light to non-destructively characterize samples.  In an ellipsometer system, the Source emits light with a known polarization, which is obliquely incident on the sample, and the Detector measures the polarization state of the light reflected from the sample.